Theses and Dissertations - UTB/UTPA
Photolithographic fabrication of 3D Penrose-like quasi-photonic crystal polymeric templates utilizing lab-made phasemask
Date of Award
Master of Science (MS)
Dr. Hasina Huq
Dr. Karen Lozano
Dr. Jae Sok Son
Photonic crystals (PhC) have recently become of great interest because of their potential as replacement of electronics and/or supplement to semiconductors technology. The PhC’s capability to make compact integrated optical circuits has already made possible the laboratory manufacture of an array of different types of optical waveguides, cavities and filters. The work presented here aimed to simultaneously fabricate a 3D-PhC templates employing six-beam holographic lithography. The basic procedures included recording gratings using interference field of laser sources in a photoresist coating on a glass substrate. The manufacturing method utilized only one optical element, a phasemask, drastically reducing the complexity of fabrication by eliminating the need multiple mirrors and beam splitters. Using this approach, a template can be created with a single exposure to laser source and just varying exposure times, increasing reproducibility.
University of Texas-Pan American
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