Theses and Dissertations - UTB/UTPA

Date of Award


Document Type


Degree Name

Master of Science (MS)


Mechanical Engineering

First Advisor

Dr. Dumitru Caruntu

Second Advisor

Dr. Karen Lozano

Third Advisor

Dr. Arturo Fuentes


The nonlinear response of an electrostatically actuated micro/nano-resonator is investigated. The resonator is parametrically actuated using an electrostatic force with a first order fringe correction. Viscous damping and the Casimir effect are included. The resonator is studied using the Method of Multiple Scales in a direct approach of the problem and then compared numerically using a Reduced Order Model based on the application of a Galerkin procedure. In addition to primary resonance (ω0), parametric resonances are found at half (½ω0), twice (2ω 0), and three-halves ([special characters omitted]ω0) natural frequency. The frequency response is investigated for excitations near primary and near half primary natural frequency. Results for a uniform capacitive resonator are provided at micro and nano scales.


Copyright 2010 Martin W. Knecht. All Rights Reserved.

Granting Institution

University of Texas-Pan American