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Conference Proceeding

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This paper deals with the amplitude-voltage response of parametric resonance of electrostatically actuated MEMS circular membranes resonator for sensing applications. The system consists of a flexible circular membrane over a parallel ground plate. A soft AC voltage is applied between the MEMS membrane and ground plate to actuate the membrane near its first natural frequency. Two methods of investigation are used in this research, namely the method of multiple scales (MMS), and the reduced order model (ROM). These methods were used to solve for the voltage response of the MEMS analytically and numerically. This work also reports the effects the damping and frequency parameters have on the voltage response. It is shown that increasing the damping parameter decreases the size of the escape band and decreases the nonlinear effect on the system. Increasing the detuning frequency decreases the size of the escape band, shifts the bifurcation points to lower voltages, and the steady-state amplitudes of the system decrease.


Copyright © 2023 by ASME Original published version available at

Publication Title

Proceedings of the ASME 2023 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference





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