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This paper investigates the nonlinear response of microelectromechanical system (MEMS) cantilever resonator electrostatically actuated by applying a soft alternating current (AC) voltage and an even softer direct current (DC) voltage between the resonators and a parallel fixed ground plate. The AC frequency is near natural frequency. This drives the resonator into nonlinear parametric resonance. The method ofmultiple scales (MMS) is used to solve the dimensionless differential equation of motion of the resonator and find the steady-state solutions.The reduced order model (ROM) method is used to validate the results obtained using MMS. The effect of the soft DC voltage (bias) component on the frequency response is reported. It is shown that the DC bias changes the subcritical Hopf bifurcation into a cyclic fold bifurcation and shifts the bifurcation point (where the system loses stability) to lower frequencies and larger amplitudes.


Copyright © 2014 D. I. Caruntu and K. N. Taylor.

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Creative Commons Attribution 4.0 International License
This work is licensed under a Creative Commons Attribution 4.0 International License.

Publication Title

Shock and Vibration





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