Theses and Dissertations
Date of Award
Master of Science (MS)
Dr. Dumitru Caruntu
Dr. Dorina M. Chipara
Dr. Javier Ortega
In this work the behavior of micro-electromechanical (MEMS) cantilever resonators is investigated. The cantilever resonators are electrostatically actuated with hard AC voltage resulting in nine distinct resonances cases including super and subharmonic resonances. The amplitude frequency and amplitude voltage bifurcation diagrams are obtained for each of the nine resonance cases. Reduced order models (ROMs) are developed to include one and two modes of vibration. Three different methods are used to solve the ROMs namely 1) the method of multiple scales (MMS), which is a perturbation method used for one mode of vibration, 2) the homotopy analysis method (HAM), which is an analytical method rooted in topology used for one mode of vibration, and 3) direct numerical integration using two modes of vibration (2T ROM) resulting in time responses of the tip of the MEMS cantilever resonator. The MMS and HAM solutions directly yield steady state solutions for the bifurcation diagrams while the 2T ROM is used to validate and demonstrate the limitations of these two methods. The effects of damping, fringe, voltage, and detuning frequency are investigated.
Reyes, Christopher I., "Secondary Resonances of Electrostatically Actuated Mems Cantilevers" (2019). Theses and Dissertations. 579.
Copyright 2019 Christopher I. Reyes. All Rights Reserved.