Theses and Dissertations - UTB/UTPA
Date of Award
8-2015
Document Type
Thesis
Degree Name
Master of Science (MS)
Department
Mechanical Engineering
First Advisor
Dr. Dumitru Caruntu
Second Advisor
Dr. Robert Freeman
Third Advisor
Dr. Javier Kypuros
Abstract
The amplitude-frequency response and voltage-amplitude response of electrostatically actuated micro and nano-electromechanical systems (M/NEMS) clamped circular plates are investigated. The system is actuated by soft AC voltage at frequency near half natural frequency of the plate, and another case near natural frequency of the plate, they resulting in primary and parametric resonances of the system, respectively. The system is first analytically modeled using the Method of Multiple Scales (MMS). MMS results are then compared to Reduced Order Model (ROM) method frequency response numerical simulations. Besides MMS and ROM, time response simulations are conducted. The agreement of the frequency responses of the three simulations is investigated. The effects of nonlinearities of the system including pull-in instability are examined. The influence of multiple parameters including excitation frequency, voltage, damping, Casimir force, and van der Waals force are reported in the micro and nano scales.
Granting Institution
University of Texas-Pan American
Comments
Copyright 2015 Reynaldo Oyervides. All Rights Reserved.
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