Theses and Dissertations - UTB/UTPA

Date of Award


Document Type


Degree Name

Master of Science (MS)


Mechanical Engineering

First Advisor

Dr. Dumitru Caruntu

Second Advisor

Dr. Robert Freeman

Third Advisor

Dr. Javier Kypuros


The amplitude-frequency response and voltage-amplitude response of electrostatically actuated micro and nano-electromechanical systems (M/NEMS) clamped circular plates are investigated. The system is actuated by soft AC voltage at frequency near half natural frequency of the plate, and another case near natural frequency of the plate, they resulting in primary and parametric resonances of the system, respectively. The system is first analytically modeled using the Method of Multiple Scales (MMS). MMS results are then compared to Reduced Order Model (ROM) method frequency response numerical simulations. Besides MMS and ROM, time response simulations are conducted. The agreement of the frequency responses of the three simulations is investigated. The effects of nonlinearities of the system including pull-in instability are examined. The influence of multiple parameters including excitation frequency, voltage, damping, Casimir force, and van der Waals force are reported in the micro and nano scales.


Copyright 2015 Reynaldo Oyervides. All Rights Reserved.

Granting Institution

University of Texas-Pan American