Theses and Dissertations - UTB/UTPA
Nonlinear dynamics of electrostatically actuated M/NEMS plates to include Casimir and van der Waals effects
Date of Award
Master of Science (MS)
Dr. Dumitru Caruntu
Dr. Robert Freeman
Dr. Javier Kypuros
The amplitude-frequency response and voltage-amplitude response of electrostatically actuated micro and nano-electromechanical systems (M/NEMS) clamped circular plates are investigated. The system is actuated by soft AC voltage at frequency near half natural frequency of the plate, and another case near natural frequency of the plate, they resulting in primary and parametric resonances of the system, respectively. The system is first analytically modeled using the Method of Multiple Scales (MMS). MMS results are then compared to Reduced Order Model (ROM) method frequency response numerical simulations. Besides MMS and ROM, time response simulations are conducted. The agreement of the frequency responses of the three simulations is investigated. The effects of nonlinearities of the system including pull-in instability are examined. The influence of multiple parameters including excitation frequency, voltage, damping, Casimir force, and van der Waals force are reported in the micro and nano scales.
University of Texas-Pan American
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