Reduced Order Model of Parametric Resonance of Electrostatically Actuated Cantilever Resonators: Comparison Uniform Versus Non-Uniform Resonators

Authors

Dumitru I. Caruntu, The University of Texas Rio Grande ValleyFollow
Rigoberto Flores, The University of Texas Rio Grande Valley

Document Type

Conference Proceeding

Publication Date

2-5-2024

Abstract

A comparison of the frequency-amplitude and voltage-amplitude responses of parametric resonance between electrostatically actuated uniform and non-uniform cantilever resonator is conducted. The non-uniform cantilever resonator has constant width and linearly varying thickness. Both microstructures uniform and non-uniform are under soft AC electrostatic actuation. Two Reduced Order Models for predicting the responses of the MEMS cantilever are used in this paper, namely one using one mode of vibration, and another one using two modes of vibration. The Method of Multiple Scales is used to solve the Reduced Order Model with one mode of vibration. A second method is a direct numerical integration is used to solve the Reduced Order Model with two modes of vibration to predict time responses of the MEMS cantilever. A third method uses AUTO 07P, a continuation and bifurcation software, to predict the responses of the MEMS cantilever. A comparison between the three methods is conducted as well.

Comments

Copyright © 2023 by ASME

Recommended Citation

Caruntu, D, & Flores, R. "Reduced Order Model of Parametric Resonance of Electrostatically Actuated Cantilever Resonators: Comparison Uniform Versus Non-Uniform Resonators." Proceedings of the ASME 2023 International Mechanical Engineering Congress and Exposition. Volume 6: Dynamics, Vibration, and Control. New Orleans, Louisiana, USA. October 29–November 2, 2023. V006T07A025. ASME. https://doi.org/10.1115/IMECE2023-113248

Publication Title

Proceedings of the ASME 2023 International Mechanical Engineering Congress and Exposition. Volume 6: Dynamics, Vibration, and Control

DOI

10.1115/IMECE2023-113248