Growth and Characterization of Gallium Oxide Thin Films and Devices

Author

Jorge Castillo, The University of Texas Rio Grande Valley

Date of Award

12-2017

Document Type

Thesis

Degree Name

Master of Science (MS)

Department

Electrical Engineering

First Advisor

Dr. Hasina Huq

Second Advisor

Dr. Heinrich Foltz

Third Advisor

Dr. Robert Jones

Abstract

Gallium oxide has promising physical and electrical properties for power applications and optoelectronics. thermally grown oxide developed from sputtered GaN layers and gallium oxide substrates will be characterized. The study will evaluate a variety of temperatures in order to investigate the advantages and disadvantages on each of the synthetization techniques.

Comments

Copyright 2017 Jorge Castillo. All Rights Reserved.

https://www.proquest.com/dissertations-theses/growth-characterization-gallium-oxide-thin-films/docview/2014469398/se-2?accountid=7119

Recommended Citation

Castillo, Jorge, "Growth and Characterization of Gallium Oxide Thin Films and Devices" (2017). Theses and Dissertations. 133.
https://scholarworks.utrgv.edu/etd/133