Resonances of Electrostatically Actuated Non-Uniform MEMS Cantilever Resonator of Constant Width and Linearly Varying Thickness

Author

Rigoberto Flores, The University of Texas Rio Grande Valley

Date of Award

12-1-2024

Document Type

Thesis

Degree Name

Master of Science in Engineering (MSE)

Department

Mechanical Engineering

First Advisor

Dumitru Caruntu

Second Advisor

Horacio Vasquez

Third Advisor

Mircea Chipara

Abstract

In this investigation the behavior of an electrostatically actuated non-uniform microelectromechanical (MEMS) cantilever resonator of constant width and linearly varying thickness is investigated. The cantilever resonator vibrates using soft AC voltage at near half the first natural frequency of the cantilever and near the first natural frequency of the cantilever, known as primary and parametric resonances, respectively. Bifurcation diagrams for the amplitude-frequency and amplitude-voltage response are obtained for both resonances. Two methods are used in this investigation, namely the Method of Multiple Scales (MMS) and Reduced Order Model (ROM) using up to 6 modes of vibration.

These methods are used to investigate the influence that the fringe correction factor, damping, voltage, and detuning parameter has on the amplitude-frequency responses and amplitude-voltage responses. The amplitude-frequency and amplitude-voltage responses of the non-uniform MEMS cantilever resonator is compared to the amplitude-frequency and amplitude-voltage response of an electrostatically actuated uniform MEMS cantilever resonator.

Comments

Copyright 2024 Rigoberto Flores. https://proquest.com/docview/3153355125

Recommended Citation

Flores, Rigoberto, "Resonances of Electrostatically Actuated Non-Uniform MEMS Cantilever Resonator of Constant Width and Linearly Varying Thickness" (2024). Theses and Dissertations. 1645.
https://scholarworks.utrgv.edu/etd/1645