Primary and Parametric Resonances of Angled Mems and NEMS Cantilever Resonators

Author

Benjamin Matthew Huerta, The University of Texas Rio Grande Valley

Date of Award

8-2025

Document Type

Thesis

Degree Name

Master of Science in Engineering (MSE)

Department

Mechanical Engineering

First Advisor

Dumitru Caruntu

Second Advisor

Ahmed Hasnain Jalal

Third Advisor

Mohammad Islam

Abstract

This work investigates the resonances of electrostatically actuated micro- and nano-electromechanical systems (MEMS/NEMS) uniform cantilever resonators positioned at an angle relative to a ground plate. The resonances considered in this work include primary and parametric resonance. For each resonance, the amplitude-frequency and amplitude-voltage responses are presented. The model is constructed using Euler-Bernoulli beam theory. Results are obtained by construction of a Reduced Order Model considering up to the first five modes of vibration. The Method of Multiple Scales is used when considering only the first mode shape, and the software AUTO 07p is used for higher terms. Two models are examined, a microscale model where the Casimir force is neglected, and a nanoscale model where its effect is considered.

Comments

Copyright 2025 Benjamin Matthew Huerta. All Rights Reserved. https://proquest.com/docview/3253954596

Recommended Citation

Huerta, B. M. (2025). Primary and parametric resonances of angled mems and NEMS cantilever resonators [Master's thesis, The University of Texas Rio Grande Valley]. ScholarWorks @ UTRGV. https://scholarworks.utrgv.edu/etd/1756