Theses and Dissertations

Date of Award


Document Type


Degree Name

Master of Science (MS)


Electrical Engineering

First Advisor

Dr. Hasina Huq

Second Advisor

Dr. Nantakan Wongkasem

Third Advisor

Dr. Megan Keniry


Plasma enhanced DC magnetron sputtering is a well-known technique for thin film deposition. Thin film has wide range of applications in many fields such as electronics, optics, communication, decoration, biosystem and medical. Among them, antibacterial and biocompatible thin film coating has attracted researcher’s attention to prevent the healthcare-associated infections (HAIs) during the surgical operations as well as the implantation of foreign devices inside human body. This research has been divided into two sections. In first section, titanium (Ti) was deposited on glass substrate at DC power of 200 W, argon-nitrogen plasma, and temperature of 25 ˚C. Later this Ti-coated glass (TG) was used as substrate for the preparation of thin film coatings of silver (Ag), Gold (Au) and their compound. Material characterization of the prepared thin films were performed by using scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS) and X-Ray photoelectron spectroscopy (XPS) analysis. The thin film growth of Ag, Au, and their compound on TG substrate was confirmed by SEM results. Finally, the MTT assay was performed to investigate cytotoxic effect of the studied thin films on human cells towards potential applications in medical implants and surgical instruments. Cytotoxicity test confirms that the prepared thin films are biocompatible. In the second section, the thin film of titanium, gold and copper was deposited on five different substrates: glass, pure silicon, n-type silicon, p-type silicon, and aluminum oxide (sapphire). This time, only argon gas was used as sputtering gas during sputtering time, and substrate cleaning was performed by three steps (deionized water, isopropyl alcohol, and nitrogen gas) to improve material contamination. After the preparation of thin films, their antibacterial and cytotoxicity test were conducted to find their potential applications as surface coating of medical devices and surgical instruments.


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