Theses and Dissertations
Date of Award
5-2021
Document Type
Thesis
Degree Name
Master of Science (MS)
Department
Mechanical Engineering
First Advisor
Dr. Dumitru Caruntu
Second Advisor
Dr. Dorina Chipara
Third Advisor
Dr. Nazmul Islam
Abstract
Two methods are used in the investigation, which are the Method of Multiple Scales (MMS) and the Reduced order Model (ROM) with up to 6 modes of vibration. The MMS is done in three ways, one based on soft excitation and the other models based on the usage of the bookkeeping parameter, ε, in the electrostatic term. These are referred to as the 1 term no ε, and the 2 term no ε, which allow it to model hard excitation. The influence of the number of terms in the Taylor expansion is explored.
These methods are used to investigate the effects of intermolecular forces such as Casimir or van der Waals, as well as the influence of voltage, the detuning parameter, and damping. This is done for both the amplitude-frequency responses, and the voltage-responses, for various frequencies such as primary, subharmonic and superharmonic resonances.
Recommended Citation
Beatriz, Julio S., "Secondary Resonances of Electrostatically Actuated MEMS and NEMS Circular Plates" (2021). Theses and Dissertations. 618.
https://scholarworks.utrgv.edu/etd/618
Comments
Copyright 2021 Julio Beatriz. All Rights Reserved.
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