Primary and Secondary Resonances of Fringe Effect Electrostatically Actuated MEMS Cantilever Resonators

Author

Miguel Armando Martinez, The University of Texas Rio Grande Valley

Date of Award

12-1-2024

Document Type

Thesis

Degree Name

Master of Science (MS)

Department

Mechanical Engineering

First Advisor

Dumitru Caruntu

Second Advisor

Arturo Fuentes

Third Advisor

Nazmul Islam

Abstract

The nonlinear dynamics of micro-electromechanical system (MEMS) cantilever resonators actuated by the fringe field at parametric and primary resonances are studied. Three models are used based on different descriptions of the system capacitance. In the fringe and capacitance models, the electrostatic force due to the parallel-plate capacitance is neglected due to a hole in the ground plate (removes overlapping area). The SolidWorks model is based on numerical capacitance simulations performed on SolidWorks using EMS. All three models that approximate the fringe field capacitance are compared with one another. The Method of Multiple Scales (MMS) and Reduced Order Model (ROM) up to five modes of vibration are the two methods applied in this study. MMS is used to solve the dimensionless partial differential equation (PDE) analytically while ROM is used to numerically integrate the mode shapes of the cantilever and provide steady-state solutions. These methods project the frequency-amplitude and voltage-amplitude responses (bifurcation diagrams) as well as time responses of the MEMS cantilever resonator. The effect of dimensionless parameters such as damping, voltage, fringe effect, and detuning frequency are then investigated.

Comments

Copyright 2024 Miguel A. Martinez. https://www.proquest.com/docview/3153375071

Recommended Citation

Martinez, M. A. (2024). Primary and Secondary Resonances of Fringe Effect Electrostatically Actuated MEMS Cantilever Resonators [Master's thesis, The University of Texas Rio Grande Valley]. ScholarWorks @ UTRGV. https://scholarworks.utrgv.edu/etd/1646